Efficient multiphysics modeling of microelectromechanical switches
DOI:
https://doi.org/10.1260/175095407783419334Abstract
Circuit simulations driven modeling approach with embedded multi-physics of capacitive radio frequency microelectromechanical systems switches is presented in this paper. Finite element method simulations in electromagnetic, electromagnetic-thermal and thermal-stress domains are sequentially performed to model and capture the behavioral phenomenology inherent to the selected device. Computed effects are then utilized to modify the original electromagnetic model, giving rise to the updated solutions with included electromagnetic-thermal-stress- electromagnetic physics. To enable circuit level design with the multi- physics models of capacitive microelectromechanical switches, an artificial neural network technique is utilized. Compared to the finite element method simulations, the developed neural network models are about 1500 times faster while maintaining smaller than 0.5% relative difference. Finally, these models are integrated in a circuit simulator, where the sensitivity study and optimization are performed to further demonstrate the advantages of the proposed modeling approach.
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