Influence of Substrate Surface Properties on Laser-induced Damage Properties of TiO2 Thin Films
DOI:
https://doi.org/10.21152/1750-9548.10.1.1Abstract
Various investigations have focused on the laser-induced damage of thin films. However, substrate surface properties have not been taken into account. TiO2 thin films with a one-quarter wavelength optical thickness were deposited by electron beam evaporation on two types of substrates with different surface properties. The surface morphologies of TiO2 thinfilms were captured by atomic force microscopy, and the laser-induced damage threshold of TiO2 thin films was measured. The relationship between the substrate surface properties and the laser-induced damage properties of TiO2 thin films was observed and analyzed.
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