Implementations of multiphysics simulation for MEMS by coupling single-physics solvers
DOI:
https://doi.org/10.1260/175095407782219201Abstract
Due to the growing demands from industries, the multiphysics simulation plays a more and more important role in the design of MEMS devices. This paper presents a fast convergence scheme which implements multiphysics simulation by coupling phenomena-specific single-physics solvers. The proposed scheme is based on the traditional staggered/relaxation approach but employs the Steffensen’s acceleration technique to speed up the convergence procedure. The performance of the proposed scheme is compared with three traditional techniques: the staggered/relaxation, the multilevel Newton and the quasi-Newton methods through several examples. The results show that this scheme is promising.
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