Implementations of multiphysics simulation for MEMS by coupling single-physics solvers

Authors

  • J Guo
  • O Querin

DOI:

https://doi.org/10.1260/175095407782219201

Abstract

Due to the growing demands from industries, the multiphysics simulation plays a more and more important role in the design of MEMS devices. This paper presents a fast convergence scheme which implements multiphysics simulation by coupling phenomena-specific single-physics solvers. The proposed scheme is based on the traditional staggered/relaxation approach but employs the Steffensen’s acceleration technique to speed up the convergence procedure. The performance of the proposed scheme is compared with three traditional techniques: the staggered/relaxation, the multilevel Newton and the quasi-Newton methods through several examples. The results show that this scheme is promising.

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Published

2007-09-30

How to Cite

Guo, J., & Querin, O. (2007). Implementations of multiphysics simulation for MEMS by coupling single-physics solvers. The International Journal of Multiphysics, 1(3), 337-366. https://doi.org/10.1260/175095407782219201

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Section

Articles