Pankratov E, Bulaeva E. Variation of redistribution of an infused dopant in a multilayer structure with variation of pressure of vapor of the dopant. IJM [Internet]. 2014Dec.31 [cited 2025Oct.5];8(4):411-20. Available from: https://themultiphysicsjournal.com/index.php/ijm/article/view/8-4-411